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Influence of PZT Coating Thickness and Electrical Pole Alignment on Microresonator Properties
With increasing technical requirements in the design of microresonators, the development of new techniques for lightweight, simple, and inexpensive components becomes relevant. Lead zirconate titanate (PZT) is a powerful tool in the formation of these components, allowing a self-actuation or self-se...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2016
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5134552/ https://ncbi.nlm.nih.gov/pubmed/27834910 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s16111893 |
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