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Textured silicon nitride: processing and anisotropic properties
Textured silicon nitride (Si(3)N(4)) has been intensively studied over the past 15 years because of its use for achieving its superthermal and mechanical properties. In this review we present the fundamental aspects of the processing and anisotropic properties of textured Si(3)N(4), with emphasis on...
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| Publicado no: | Sci Technol Adv Mater |
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| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Taylor & Francis
2008
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5099652/ https://ncbi.nlm.nih.gov/pubmed/27877995 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/1468-6996/9/3/033001 |
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