A carregar...
Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition
Atomic layer deposition (ALD) is a commercially utilized deposition method for electronic materials. ALD growth of thin films offers thickness control and conformality by taking advantage of self-limiting reactions between vapor-phase precursors and the growing film. Perovskite oxides present potent...
Na minha lista:
| Publicado no: | J Vis Exp |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MyJove Corporation
2016
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5091695/ https://ncbi.nlm.nih.gov/pubmed/27501462 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3791/54268 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|