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Nanomechanical properties of silicon surfaces nanostructured by excimer laser

Excimer laser irradiation at ambient temperature has been employed to produce nanostructured silicon surfaces. Nanoindentation was used to investigate the nanomechanical properties of the deformed surfaces as a function of laser parameters, such as the angle of incidence and number of laser pulses a...

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書目詳細資料
發表在:Sci Technol Adv Mater
Main Authors: Kumar, Prashant, Kiran, M S R N
格式: Artigo
語言:Inglês
出版: Taylor & Francis 2010
主題:
在線閱讀:https://ncbi.nlm.nih.gov/pmc/articles/PMC5090273/
https://ncbi.nlm.nih.gov/pubmed/27877331
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/1468-6996/11/2/025003
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