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Combinatorial investigation of Fe–B thin-film nanocomposites

Combinatorial magnetron sputter deposition from elemental targets was used to create Fe–B composition spread type thin film materials libraries on thermally oxidized 4-in. Si wafers. The materials libraries consisting of wedge-type multilayer thin films were annealed at 500 or 700 °C to transform th...

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Bibliografische gegevens
Gepubliceerd in:Sci Technol Adv Mater
Hoofdauteurs: Brunken, Hayo, Grochla, Dario, Savan, Alan, Kieschnick, Michael, Meijer, Jan D, Ludwig, Alfred
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: Taylor & Francis 2011
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Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5074429/
https://ncbi.nlm.nih.gov/pubmed/27877435
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/1468-6996/12/5/054208
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