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Combinatorial investigation of Fe–B thin-film nanocomposites
Combinatorial magnetron sputter deposition from elemental targets was used to create Fe–B composition spread type thin film materials libraries on thermally oxidized 4-in. Si wafers. The materials libraries consisting of wedge-type multilayer thin films were annealed at 500 or 700 °C to transform th...
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| Publicado no: | Sci Technol Adv Mater |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Taylor & Francis
2011
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5074429/ https://ncbi.nlm.nih.gov/pubmed/27877435 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/1468-6996/12/5/054208 |
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