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The pressure sensitivity of wrinkled B-doped nanocrystalline diamond membranes

Nanocrystalline diamond (NCD) membranes are promising candidates for use as sensitive pressure sensors. NCD membranes are able to withstand harsh conditions and are easily fabricated on glass. In this study the sensitivity of heavily boron doped NCD (B:NCD) pressure sensors is evaluated with respect...

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Détails bibliographiques
Publié dans:Sci Rep
Auteurs principaux: Drijkoningen, S., Janssens, S. D., Pobedinskas, P., Koizumi, S., Van Bael, M. K., Haenen, K.
Format: Artigo
Langue:Inglês
Publié: Nature Publishing Group 2016
Sujets:
Accès en ligne:https://ncbi.nlm.nih.gov/pmc/articles/PMC5073358/
https://ncbi.nlm.nih.gov/pubmed/27767048
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep35667
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