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The pressure sensitivity of wrinkled B-doped nanocrystalline diamond membranes
Nanocrystalline diamond (NCD) membranes are promising candidates for use as sensitive pressure sensors. NCD membranes are able to withstand harsh conditions and are easily fabricated on glass. In this study the sensitivity of heavily boron doped NCD (B:NCD) pressure sensors is evaluated with respect...
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| Publicado en: | Sci Rep |
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| Autores principales: | , , , , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Nature Publishing Group
2016
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5073358/ https://ncbi.nlm.nih.gov/pubmed/27767048 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep35667 |
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