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The pressure sensitivity of wrinkled B-doped nanocrystalline diamond membranes

Nanocrystalline diamond (NCD) membranes are promising candidates for use as sensitive pressure sensors. NCD membranes are able to withstand harsh conditions and are easily fabricated on glass. In this study the sensitivity of heavily boron doped NCD (B:NCD) pressure sensors is evaluated with respect...

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Bibliografiske detaljer
Udgivet i:Sci Rep
Main Authors: Drijkoningen, S., Janssens, S. D., Pobedinskas, P., Koizumi, S., Van Bael, M. K., Haenen, K.
Format: Artigo
Sprog:Inglês
Udgivet: Nature Publishing Group 2016
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5073358/
https://ncbi.nlm.nih.gov/pubmed/27767048
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep35667
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