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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and automotive. However, effective inspection and characterization metrology systems are needed to ensure the functional reliability of MEMS. This study p...

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Detalhes bibliográficos
Publicado no:J Vis Exp
Main Authors: Bourgade, Thomas, Jianfei, Sun, Wang, Zhaomin, Elsa, Rosmin, Asundi, Anand
Formato: Artigo
Idioma:Inglês
Publicado em: MyJove Corporation 2016
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4993326/
https://ncbi.nlm.nih.gov/pubmed/27404277
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3791/53630
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