Carregant...
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and automotive. However, effective inspection and characterization metrology systems are needed to ensure the functional reliability of MEMS. This study p...
Guardat en:
| Publicat a: | J Vis Exp |
|---|---|
| Autors principals: | , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MyJove Corporation
2016
|
| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4993326/ https://ncbi.nlm.nih.gov/pubmed/27404277 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3791/53630 |
| Etiquetes: |
Afegir etiqueta
Sense etiquetes, Sigues el primer a etiquetar aquest registre!
|