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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and automotive. However, effective inspection and characterization metrology systems are needed to ensure the functional reliability of MEMS. This study p...

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Dades bibliogràfiques
Publicat a:J Vis Exp
Autors principals: Bourgade, Thomas, Jianfei, Sun, Wang, Zhaomin, Elsa, Rosmin, Asundi, Anand
Format: Artigo
Idioma:Inglês
Publicat: MyJove Corporation 2016
Matèries:
Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC4993326/
https://ncbi.nlm.nih.gov/pubmed/27404277
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3791/53630
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