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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and automotive. However, effective inspection and characterization metrology systems are needed to ensure the functional reliability of MEMS. This study p...
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| Publicado no: | J Vis Exp |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MyJove Corporation
2016
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4993326/ https://ncbi.nlm.nih.gov/pubmed/27404277 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3791/53630 |
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