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Hard X-Ray Microscope With Submicrometer Spatial Resolution
A high-resolution hard x-ray microscope is described. This system is capable of detecting line features as small as 0.6 µm in width, and resolving line pairs 1.2-µm wide and 1.2-µm apart. Three types of two-dimensional image detectors are discussed and compared for use with hard x rays in high resol...
Shranjeno v:
| izdano v: | J Res Natl Inst Stand Technol |
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| Main Authors: | , , , , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
1990
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| Teme: | |
| Online dostop: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4930020/ https://ncbi.nlm.nih.gov/pubmed/28179792 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.095.044 |
| Oznake: |
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