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Stochastic behavior of nanoscale dielectric wall buckling
The random buckling patterns of nanoscale dielectric walls are analyzed using a nonlinear multi-scale stochastic method that combines experimental measurements with simulations. The dielectric walls, approximately 200 nm tall and 20 nm wide, consist of compliant, low dielectric constant (low-k) fins...
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| Publicado no: | J Appl Phys |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2016
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4908835/ https://ncbi.nlm.nih.gov/pubmed/27330220 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.4943615 |
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