Bright focused ion beam sources based on laser-cooled atoms

Nanoscale focused ion beams (FIBs) represent one of the most useful tools in nanotechnology, enabling nanofabrication via milling and gas-assisted deposition, microscopy and microanalysis, and selective, spatially resolved doping of materials. Recently, a new type of FIB source has emerged, which us...

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Bibliographic Details
Published in:Appl Phys Rev
Main Authors: McClelland, J. J., Steele, A. V., Knuffman, B., Twedt, K. A., Schwarzkopf, A., Wilson, T. M.
Format: Artigo
Language:Inglês
Published: 2016
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Article
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC4882766/
https://ncbi.nlm.nih.gov/pubmed/27239245
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.4944491
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