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Bright focused ion beam sources based on laser-cooled atoms
Nanoscale focused ion beams (FIBs) represent one of the most useful tools in nanotechnology, enabling nanofabrication via milling and gas-assisted deposition, microscopy and microanalysis, and selective, spatially resolved doping of materials. Recently, a new type of FIB source has emerged, which us...
Tallennettuna:
| Julkaisussa: | Appl Phys Rev |
|---|---|
| Päätekijät: | , , , , , |
| Aineistotyyppi: | Artigo |
| Kieli: | Inglês |
| Julkaistu: |
2016
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| Aiheet: | |
| Linkit: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4882766/ https://ncbi.nlm.nih.gov/pubmed/27239245 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.4944491 |
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