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Embedded MicroHeating Elements in Polymeric MicroChannels for Temperature Control and Fluid Flow Sensing
This paper describes the first demonstration of temperature control and flow sensing of fluids using integrated circuit (IC)-based microheating elements embedded in microchannels molded in polydimethylsiloxane (PDMS). Fluid channels and connections to capillary tubing are molded in PDMS using a sili...
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| Published in: | J Res Natl Inst Stand Technol |
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| Main Authors: | , |
| Format: | Artigo |
| Language: | Inglês |
| Published: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
2004
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| Subjects: | |
| Online Access: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4854316/ https://ncbi.nlm.nih.gov/pubmed/27366617 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.109.025 |
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