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The Characterization of Surface Acoustic Wave Devices Based on AlN-Metal Structures
We report in this paper on the study of surface acoustic wave (SAW) resonators based on an AlN/titanium alloy (TC4) structure. The AlN/TC4 structure with different thicknesses of AlN films was simulated, and the acoustic propagating modes were discussed. Based on the simulation results, interdigital...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2016
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4851040/ https://ncbi.nlm.nih.gov/pubmed/27077864 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s16040526 |
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