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Fabrication and Evaluation of a Graphene Oxide-Based Capacitive Humidity Sensor †
In this study, a CMOS compatible capacitive humidity sensor structure was designed and fabricated on a 200 mm CMOS BEOL Line. A top Al interconnect layer was used as an electrode with a comb/serpent structure, and graphene oxide (GO) was used as sensing material. XRD analysis was done which shows th...
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| Publicat a: | Sensors (Basel) |
|---|---|
| Autors principals: | , , , , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2016
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4813889/ https://ncbi.nlm.nih.gov/pubmed/26938538 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s16030314 |
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