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Multilayer block copolymer meshes by orthogonal self-assembly
Continued scaling-down of lithographic-pattern feature sizes has brought templated self-assembly of block copolymers (BCPs) into the forefront of nanofabrication research. Technologies now exist that facilitate significant control over otherwise unorganized assembly of BCP microdomains to form both...
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Publicado no: | Nat Commun |
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Main Authors: | , , , , , |
Formato: | Artigo |
Idioma: | Inglês |
Publicado em: |
Nature Publishing Group
2016
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Assuntos: | |
Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4736107/ https://ncbi.nlm.nih.gov/pubmed/26796218 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/ncomms10518 |
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