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Large area scanning probe microscope in ultra-high vacuum demonstrated for electrostatic force measurements on high-voltage devices
Background: The resolution in electrostatic force microscopy (EFM), a descendant of atomic force microscopy (AFM), has reached nanometre dimensions, necessary to investigate integrated circuits in modern electronic devices. However, the characterization of conducting or semiconducting power devices...
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| Publicado en: | Beilstein J Nanotechnol |
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| Autores principales: | , , , , , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Beilstein-Institut
2015
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4734346/ https://ncbi.nlm.nih.gov/pubmed/26885461 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.6.258 |
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