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An Areal Isotropic Spline Filter for Surface Metrology

This paper deals with the application of the spline filter as an areal filter for surface metrology. A profile (2D) filter is often applied in orthogonal directions to yield an areal filter for a three-dimensional (3D) measurement. Unlike the Gaussian filter, the spline filter presents an anisotropi...

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Bibliografske podrobnosti
izdano v:J Res Natl Inst Stand Technol
Main Authors: Zhang, Hao, Tong, Mingsi, Chu, Wei
Format: Artigo
Jezik:Inglês
Izdano: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 2015
Teme:
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC4730676/
https://ncbi.nlm.nih.gov/pubmed/26958439
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.120.006
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