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Optimization Of PVDF-TrFE Processing Conditions For The Fabrication Of Organic MEMS Resonators
This paper reports a systematic optimization of processing conditions of PVDF-TrFE piezoelectric thin films, used as integrated transducers in organic MEMS resonators. Indeed, despite data on electromechanical properties of PVDF found in the literature, optimized processing conditions that lead to t...
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| Veröffentlicht in: | Sci Rep |
|---|---|
| Hauptverfasser: | , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Nature Publishing Group
2016
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4726305/ https://ncbi.nlm.nih.gov/pubmed/26792224 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep19426 |
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