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Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity
This paper describes the design and experimental evaluation of a silicon micro-machined resonant accelerometer (SMRA). This type of accelerometer works on the principle that a proof mass under acceleration applies force to two double-ended tuning fork (DETF) resonators, and the frequency output of t...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2015
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4704730/ https://ncbi.nlm.nih.gov/pubmed/26633425 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s151229803 |
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