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Speckle lithography for fabricating Gaussian, quasi-random 2D structures and black silicon structures

Laser speckle pattern is a granular structure formed due to random coherent wavelet interference and generally considered as noise in optical systems including photolithography. Contrary to this, in this paper, we use the speckle pattern to generate predictable and controlled Gaussian random structu...

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Shranjeno v:
Bibliografske podrobnosti
izdano v:Sci Rep
Main Authors: Bingi, Jayachandra, Murukeshan, Vadakke Matham
Format: Artigo
Jezik:Inglês
Izdano: Nature Publishing Group 2015
Teme:
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC4683453/
https://ncbi.nlm.nih.gov/pubmed/26679513
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep18452
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