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Speckle lithography for fabricating Gaussian, quasi-random 2D structures and black silicon structures
Laser speckle pattern is a granular structure formed due to random coherent wavelet interference and generally considered as noise in optical systems including photolithography. Contrary to this, in this paper, we use the speckle pattern to generate predictable and controlled Gaussian random structu...
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| Publicat a: | Sci Rep |
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| Autors principals: | , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Nature Publishing Group
2015
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4683453/ https://ncbi.nlm.nih.gov/pubmed/26679513 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep18452 |
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