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Optimization of Surface Acoustic Wave-Based Rate Sensors

The optimization of an surface acoustic wave (SAW)-based rate sensor incorporating metallic dot arrays was performed by using the approach of partial-wave analysis in layered media. The optimal sensor chip designs, including the material choice of piezoelectric crystals and metallic dots, dot thickn...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Xu, Fangqian, Wang, Wen, Shao, Xiuting, Liu, Xinlu, Liang, Yong
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2015
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4634411/
https://ncbi.nlm.nih.gov/pubmed/26473865
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s151025761
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