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Micromachined silicon acoustic delay lines for ultrasound applications
In this paper, we present the design, fabrication and testing of novel micromachined silicon-based acoustic delay lines. The acoustic properties of different silicon delay line structures have been characterized. Based on the experiment results, two different acoustic delay line systems (parallel an...
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| Published in: | J Micromech Microeng |
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| Main Authors: | , , , |
| Format: | Artigo |
| Language: | Inglês |
| Published: |
2013
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| Subjects: | |
| Online Access: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4627599/ https://ncbi.nlm.nih.gov/pubmed/26523093 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/23/2/025006 |
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