A New Strategy of Lithography Based on Phase Separation of Polymer Blends

Herein, we propose a new strategy of maskless lithographic approach to fabricate micro/nano-porous structures by phase separation of polystyrene (PS)/Polyethylene glycol (PEG) immiscible polymer blend. Its simple process only involves a spin coating of polymer blend followed by a development with de...

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Detalhes bibliográficos
Publicado no:Sci Rep
Main Authors: Guo, Xu, Liu, Long, Zhuang, Zhe, Chen, Xin, Ni, Mengyang, Li, Yang, Cui, Yushuang, Zhan, Peng, Yuan, Changsheng, Ge, Haixiong, Wang, Zhenlin, Chen, Yanfeng
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group 2015
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Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4626759/
https://ncbi.nlm.nih.gov/pubmed/26515790
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep15947
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