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Advanced Liquid-Free, Piezoresistive, SOI-Based Pressure Sensors for Measurements in Harsh Environments

In this paper we present and discuss two innovative liquid-free SOI sensors for pressure measurements in harsh environments. The sensors are capable of measuring pressures at high temperatures. In both concepts media separation is realized using a steel membrane. The two concepts represent two diffe...

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Bibliografski detalji
Izdano u:Sensors (Basel)
Glavni autori: Ngo, Ha-Duong, Mukhopadhyay, Biswaijit, Ehrmann, Oswin, Lang, Klaus-Dieter
Format: Artigo
Jezik:Inglês
Izdano: MDPI 2015
Teme:
Online pristup:https://ncbi.nlm.nih.gov/pmc/articles/PMC4570423/
https://ncbi.nlm.nih.gov/pubmed/26295235
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150820305
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