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A Micro-Machined Microphone Based on a Combination of Electret and Field-Effect Transistor

Capacitive-type transduction is now widely used in MEMS microphones. However, its sensitivity decreases with reducing size, due to decreasing air gap capacitance. In the present study, we proposed and developed the Electret Gate of Field Effect Transistor (ElGoFET) transduction based on an electret...

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Détails bibliographiques
Publié dans:Sensors (Basel)
Auteurs principaux: Shin, Kumjae, Jeon, Junsik, West, James Edward, Moon, Wonkyu
Format: Artigo
Langue:Inglês
Publié: MDPI 2015
Sujets:
Accès en ligne:https://ncbi.nlm.nih.gov/pmc/articles/PMC4570419/
https://ncbi.nlm.nih.gov/pubmed/26295231
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150820232
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