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Microhotplate Temperature Sensor Calibration and BIST

In this paper we describe a novel long-term microhotplate temperature sensor calibration technique suitable for Built-In Self Test (BIST). The microhotplate thermal resistance (thermal efficiency) and the thermal voltage from an integrated platinum-rhodium thermocouple were calibrated against a fres...

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Detalhes bibliográficos
Publicado no:J Res Natl Inst Stand Technol
Main Authors: Afridi, M., Montgomery, C., Cooper-Balis, E., Semancik, S., Kreider, K. G., Geist, J.
Formato: Artigo
Idioma:Inglês
Publicado em: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 2011
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4551223/
https://ncbi.nlm.nih.gov/pubmed/26989603
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.116.025
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