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Numerical simulation of ISFET structures for biosensing devices with TCAD tools
BACKGROUND: Ion Sensitive Field Effect Transistors (ISFETs) are one of the primitive structures for the fabrication of biosensors (BioFETs). Aiming at the optimization of the design and fabrication processes of BioFETs, the correlation between technological parameters and device electrical response...
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| 出版年: | Biomed Eng Online |
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| 主要な著者: | , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
BioMed Central
2015
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4547192/ https://ncbi.nlm.nih.gov/pubmed/26329255 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1475-925X-14-S2-S3 |
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