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Numerical simulation of ISFET structures for biosensing devices with TCAD tools
BACKGROUND: Ion Sensitive Field Effect Transistors (ISFETs) are one of the primitive structures for the fabrication of biosensors (BioFETs). Aiming at the optimization of the design and fabrication processes of BioFETs, the correlation between technological parameters and device electrical response...
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| Publicado no: | Biomed Eng Online |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
BioMed Central
2015
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4547192/ https://ncbi.nlm.nih.gov/pubmed/26329255 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1475-925X-14-S2-S3 |
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