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Numerical simulation of ISFET structures for biosensing devices with TCAD tools
BACKGROUND: Ion Sensitive Field Effect Transistors (ISFETs) are one of the primitive structures for the fabrication of biosensors (BioFETs). Aiming at the optimization of the design and fabrication processes of BioFETs, the correlation between technological parameters and device electrical response...
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| Publié dans: | Biomed Eng Online |
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| Auteurs principaux: | , , , |
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
BioMed Central
2015
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4547192/ https://ncbi.nlm.nih.gov/pubmed/26329255 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1475-925X-14-S2-S3 |
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