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A Tapered Aluminium Microelectrode Array for Improvement of Dielectrophoresis-Based Particle Manipulation
In this work, the dielectrophoretic force (F(DEP)) response of Aluminium Microelectrode Arrays with tapered profile is investigated through experimental measurements and numerical simulations. A standard CMOS processing technique with a step for the formation of a tapered profile resist is implement...
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| Pubblicato in: | Sensors (Basel) |
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| Autori principali: | , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2015
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4481918/ https://ncbi.nlm.nih.gov/pubmed/25970255 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150510973 |
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