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CMOS compatible high-Q photonic crystal nanocavity fabricated with photolithography on silicon photonic platform

Progress on the fabrication of ultrahigh-Q photonic-crystal nanocavities (PhC-NCs) has revealed the prospect for new applications including silicon Raman lasers that require a strong confinement of light. Among various PhC-NCs, the highest Q has been recorded with silicon. On the other hand, microca...

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Detalhes bibliográficos
Publicado no:Sci Rep
Main Authors: Ooka, Yuta, Tetsumoto, Tomohiro, Fushimi, Akihiro, Yoshiki, Wataru, Tanabe, Takasumi
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group 2015
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4471896/
https://ncbi.nlm.nih.gov/pubmed/26086849
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep11312
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