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Optical probe for surface and subsurface defects induced by ion bombardment
We demonstrate that reflectance difference spectroscopy (RDS) is sensitive to defects induced by ion bombardment, located either in the topmost layer or in the subsurface region. Most importantly, these two kinds of defects can be spectrally discriminated, since the corresponding signatures in the R...
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| Veröffentlicht in: | Phys Status Solidi Rapid Res Lett |
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| Hauptverfasser: | , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
WILEY-VCH Verlag
2013
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4461859/ https://ncbi.nlm.nih.gov/pubmed/26089989 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1002/pssr.201307088 |
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