APA aipamena

Mayrhofer, P., Euchner, H., Bittner, A., & Schmid, U. (2015). Circular test structure for the determination of piezoelectric constants of Sc(x)Al(1−x)N thin films applying Laser Doppler Vibrometry and FEM simulations(). Sens Actuators A Phys.

Chicago Style aipamena

Mayrhofer, P.M., H. Euchner, A. Bittner, and U. Schmid. "Circular Test Structure for the Determination of Piezoelectric Constants of Sc(x)Al(1−x)N Thin Films Applying Laser Doppler Vibrometry and FEM Simulations()." Sens Actuators A Phys 2015.

MLA aipamena

Mayrhofer, P.M., H. Euchner, A. Bittner, and U. Schmid. "Circular Test Structure for the Determination of Piezoelectric Constants of Sc(x)Al(1−x)N Thin Films Applying Laser Doppler Vibrometry and FEM Simulations()." Sens Actuators A Phys 2015.