Crystallization dynamics and interface stability of strontium titanate thin films on silicon

Different physical vapor deposition methods have been used to fabricate strontium titanate thin films. Within the binary phase diagram of SrO and TiO(2) the stoichiometry ranges from Ti rich to Sr rich, respectively. The crystallization of these amorphous SrTiO(3) layers is investigated by in situ g...

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Detalhes bibliográficos
Publicado no:J Appl Crystallogr
Main Authors: Hanzig, Florian, Hanzig, Juliane, Mehner, Erik, Richter, Carsten, Veselý, Jozef, Stöcker, Hartmut, Abendroth, Barbara, Motylenko, Mykhaylo, Klemm, Volker, Novikov, Dmitri, Meyer, Dirk C.
Formato: Artigo
Idioma:Inglês
Publicado em: International Union of Crystallography 2015
Assuntos:
Research Papers
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4379435/
https://ncbi.nlm.nih.gov/pubmed/25844077
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1107/S160057671500240X
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