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A New Z-axis Resonant Micro-Accelerometer Based on Electrostatic Stiffness
Presented in the paper is the design, the simulation, the fabrication and the experiment of a new z-axis resonant accelerometer based on the electrostatic stiffness. The new z-axis resonant micro-accelerometer, which consists of a torsional accelerometer and two plane resonators, decouples the sensi...
Spremljeno u:
| Izdano u: | Sensors (Basel) |
|---|---|
| Glavni autori: | , , , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
MDPI
2015
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| Teme: | |
| Online pristup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4327043/ https://ncbi.nlm.nih.gov/pubmed/25569748 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150100687 |
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