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Theoretical Prediction of Experimental Jump and Pull-In Dynamics in a MEMS Sensor
The present research study deals with an electrically actuated MEMS device. An experimental investigation is performed, via frequency sweeps in a neighbourhood of the first natural frequency. Resonant behavior is explored, with special attention devoted to jump and pull-in dynamics. A theoretical si...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4208215/ https://ncbi.nlm.nih.gov/pubmed/25225873 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s140917089 |
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