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Developing Barbed Microtip-Based Electrode Arrays for Biopotential Measurement
This study involved fabricating barbed microtip-based electrode arrays by using silicon wet etching. KOH anisotropic wet etching was employed to form a standard pyramidal microtip array and HF/HNO(3) isotropic etching was used to fabricate barbs on these microtips. To improve the electrical conducta...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4168478/ https://ncbi.nlm.nih.gov/pubmed/25014098 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s140712370 |
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