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Wireless Displacement Sensing of Micromachined Spiral-Coil Actuator Using Resonant Frequency Tracking
This paper reports a method that enables real-time displacement monitoring and control of micromachined resonant-type actuators using wireless radiofrequency (RF). The method is applied to an out-of-plane, spiral-coil microactuator based on shape-memory-alloy (SMA). The SMA spiral coil forms an indu...
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| Main Authors: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2014
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4168463/ https://ncbi.nlm.nih.gov/pubmed/25014100 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s140712399 |
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