Modeling of a High Force Density Fishbone Shaped Electrostatic Comb Drive Microactuator

This paper presents the design and evaluation of a high force density fishbone shaped electrostatic comb drive actuator. This comb drive actuator has a branched structure similar to a fishbone, which is intended to increase the capacitance of the electrodes and hence increase the electrostatic actua...

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Detalhes bibliográficos
Main Authors: Megat Hasnan, Megat Muhammad Ikhsan, Mohd Sabri, Mohd Faizul, Mohd Said, Suhana, Nik Ghazali, Nik Nazri
Formato: Artigo
Idioma:Inglês
Publicado em: Hindawi Publishing Corporation 2014
Assuntos:
Research Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4140127/
https://ncbi.nlm.nih.gov/pubmed/25165751
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1155/2014/912683
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