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A low power, on demand electrothermal valve for wireless drug delivery applications
We present a low power, on demand Parylene MEMS electrothermal valve. A novel Ω-shaped thermal resistive element requires low power (~mW) and enables rapid valve opening (~ms). Using both finite element analysis and valve opening experiments, a robust resistive element design for improved valve open...
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| Main Authors: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2009
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4134919/ https://ncbi.nlm.nih.gov/pubmed/20024057 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1039/b910248e |
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