טוען...
Photolithographic surface micromachining of polydimethylsiloxane (PDMS)
A major technical hurdle in microfluidics is the difficulty in achieving high fidelity lithographic patterning on polydimethylsiloxane (PDMS). Here, we report a simple yet highly precise and repeatable PDMS surface micromachining method using direct photolithography followed by reactive ion etching...
שמור ב:
| Main Authors: | , , |
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| פורמט: | Artigo |
| שפה: | Inglês |
| יצא לאור: |
2011
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| נושאים: | |
| גישה מקוונת: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4120064/ https://ncbi.nlm.nih.gov/pubmed/22089984 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1039/c1lc20721k |
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