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A Novel Micro- and Nano-Scale Positioning Sensor Based on Radio Frequency Resonant Cavities
In many micro- and nano-scale technological applications high sensitivity displacement sensors are needed, especially in ultraprecision metrology and manufacturing. In this work a new way of sensing displacement based on radio frequency resonant cavities is presented and experimentally demonstrated...
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| Main Authors: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4118353/ https://ncbi.nlm.nih.gov/pubmed/24887041 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s140609615 |
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