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Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
Measurements of the heat capacity and superfluid fraction of confined (4)He have been performed near the lambda transition using lithographically patterned and bonded silicon wafers. Unlike confinements in porous materials often used for these types of experiments(3), bonded wafers provide predesign...
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| Main Authors: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MyJove Corporation
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4089493/ https://ncbi.nlm.nih.gov/pubmed/24457563 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3791/51179 |
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