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Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

Measurements of the heat capacity and superfluid fraction of confined (4)He have been performed near the lambda transition using lithographically patterned and bonded silicon wafers. Unlike confinements in porous materials often used for these types of experiments(3), bonded wafers provide predesign...

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Autori principali: Thomson, Stephen R. D., Perron, Justin K., Kimball, Mark O., Mehta, Sarabjit, Gasparini, Francis M.
Natura: Artigo
Lingua:Inglês
Pubblicazione: MyJove Corporation 2014
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Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC4089493/
https://ncbi.nlm.nih.gov/pubmed/24457563
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3791/51179
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