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Design Considerations and Performance of MEMS Acoustoelectric Ultrasound Detectors
Most single-element hydrophones depend on a piezoelectric material that converts pressure changes to electricity. These devices, however, can be expensive, susceptible to damage at high pressure, and/or have limited bandwidth and sensitivity. We have previously described the acoustoelectric (AE) hyd...
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| Hauptverfasser: | , , , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
2013
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4048741/ https://ncbi.nlm.nih.gov/pubmed/24658721 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/TUFFC.2013.2775 |
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