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MEMS based Low Cost Piezoresistive Microcantilever Force Sensor and Sensor Module
In the present work, we report fabrication and characterization of a low-cost MEMS based piezoresistive micro-force sensor with SU-8 tip using laboratory made silicon-on-insulator (SOI) substrate. To prepare SOI wafer, silicon film (0.8 µm thick) was deposited on an oxidized silicon wafer using RF m...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4026197/ https://ncbi.nlm.nih.gov/pubmed/24855449 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.mssp.2013.12.016 |
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