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Novel multi-sided, microelectrode arrays for implantable neural applications

A new parylene-based microfabrication process is presented for neural recording and drug delivery applications. We introduce a large design space for electrode placement and structural flexibility with a six mask process. By using chemical mechanical polishing, electrode sites may be created top-sid...

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Main Authors: Seymour, John P., Langhals, Nick B., Anderson, David J., Kipke, Daryl R.
Format: Artigo
Jezik:Inglês
Izdano: 2011
Teme:
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC4013149/
https://ncbi.nlm.nih.gov/pubmed/21301965
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s10544-011-9512-z
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