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Novel multi-sided, microelectrode arrays for implantable neural applications
A new parylene-based microfabrication process is presented for neural recording and drug delivery applications. We introduce a large design space for electrode placement and structural flexibility with a six mask process. By using chemical mechanical polishing, electrode sites may be created top-sid...
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| Main Authors: | , , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
2011
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4013149/ https://ncbi.nlm.nih.gov/pubmed/21301965 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s10544-011-9512-z |
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