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Enhanced light absorption of amorphous silicon thin film by substrate control and ion irradiation
Large-area periodically aligned silicon nanopillar (PASiNP) arrays were fabricated by magnetic sputtering with glancing angle deposition (GLAD) on substrates coated by a monolayer of close-packed polystyrene (PS) nanospheres. The structure of PASiNP arrays could be manipulated by changing the diamet...
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| Main Authors: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3998514/ https://ncbi.nlm.nih.gov/pubmed/24717078 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-173 |
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