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SU-8 Guiding Layer for Love Wave Devices
SU-8 is a technologically important photoresist used extensively for the fabrication of microfluidics and MEMS, allowing high aspect ratio structures to be produced. In this work we report the use of SU-8 as a Love wave sensor guiding layer which allows the possibility of integrating a guiding layer...
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| Main Authors: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Molecular Diversity Preservation International (MDPI)
2007
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3965230/ https://ncbi.nlm.nih.gov/pubmed/28903244 |
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