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A High Temperature Capacitive Pressure Sensor Based on Alumina Ceramic for in Situ Measurement at 600 °C

In response to the growing demand for in situ measurement of pressure in high-temperature environments, a high temperature capacitive pressure sensor is presented in this paper. A high-temperature ceramic material-alumina is used for the fabrication of the sensor, and the prototype sensor consists o...

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Detalhes bibliográficos
Main Authors: Tan, Qiulin, Li, Chen, Xiong, Jijun, Jia, Pinggang, Zhang, Wendong, Liu, Jun, Xue, Chenyang, Hong, Yingping, Ren, Zhong, Luo, Tao
Formato: Artigo
Idioma:Inglês
Publicado em: Molecular Diversity Preservation International (MDPI) 2014
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3958212/
https://ncbi.nlm.nih.gov/pubmed/24487624
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s140202417
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