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The Development of Micromachined Gyroscope Structure and Circuitry Technology
This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized i...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Molecular Diversity Preservation International (MDPI)
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3926620/ https://ncbi.nlm.nih.gov/pubmed/24424468 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s140101394 |
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