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ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor

The ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrate using Pt as interdigitated electrodes. The structure was characterized by XRD and SEM analyses, and the ethanol vapor gas sensing as well as electrical properties have been investigated and discussed. The gas sensing resu...

Disgrifiad llawn

Wedi'i Gadw mewn:
Manylion Llyfryddiaeth
Prif Awduron: Chou, Shih Min, Teoh, Lay Gaik, Lai, Wei Hao, Su, Yen Hsun, Hon, Min Hsiung
Fformat: Artigo
Iaith:Inglês
Cyhoeddwyd: Molecular Diversity Preservation International (MDPI) 2006
Pynciau:
Mynediad Ar-lein:https://ncbi.nlm.nih.gov/pmc/articles/PMC3909404/
Tagiau: Ychwanegu Tag
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